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LD-601 Series - Wafer Edge Detection Sensors

LD-601 Series - Wafer Edge Detection Sensors

Laser based micrometer for semiconductor wafer edge detection

The LD series of laser edge detection sensors offers high-accuracy measurement using a red semiconductor laser and CCD receiver combination. Both are mounted to the same body ensuring accurate alignment out of the box. The laser element is available in either a class 1 or 2 type. Stable sensing over a long period of time has been achieved by integrating a shade correction function that compensates for any receiver sensitivity variation and generates a uniform sensitivity distribution. Four sensing methods are available including edge and width measurements in either light or dark mode.


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LD-601

LD-601

Panasonic (formerly Sunx) Laser Based Edge Detection SensorWidth and edge measurement sensing modes1..


$1,922.25 $2,089.40
Availability: Obsolete - Call for Options

LD-C60

LD-C60

Panasonic (formerly Sunx) Laser Based Edge Detection Controller24 VDC input. NPN output4 digit LED m..


$1,177.32 $1,279.70
Availability: 1

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